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Zeng, Wanxue; Wang, Xiaodong; Meiere, Scott H.; Eisenbraun, Eric (2006).
[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Low Temperature ALD MoN for Applications in Nanoscale Devices. , 1(), 163–168.
doi:10.1149/1.2218488
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