Katarzyna Gawlińska-Nęcek;Mateusz Wlazło;Robert Socha;Ireneusz Stefaniuk;Łukasz Major;Piotr Panek; (2021). Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method . Materials, (), –.
doi:10.3390/ma14041038
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