Yeh, Matt; Hsu, Fan Yi; Lin, Shun Wu; Liao, Ducky; Houyang, Eric; Yang, T.J.; Ku, Scott; Yang, C.M. (2012). High Temperature SPM Process Study for Stripping of Implanted Photoresist. Solid State Phenomena, 187(), 89–92.
doi:10.4028/www.scientific.net/SSP.187.89
url to share this paper:
An interview with Sci-Hub Founder Alexandra Elbakyan Who exactly should pay for academic research